Templated Self-Assembly of Block Copolymer Thin Films Under Lithographic Confinement
نویسندگان
چکیده
منابع مشابه
Chemical and Physical Methods of the Templated Direction of Block Copolymers
This thesis discusses the investigation of various aspects of templated self-assembly of block copolymer (BCP) thin films for nanofeature fabrication. Two chapters outline the research of a combined physical and chemical templating method with two BCPs. The method was not effective in templating poly(styrene-block-methyl methacrylate) (PS-b-PMMA) BCP because of limited template wettability. The...
متن کاملDirected assembly of lamellae forming block copolymer thin films near the order-disorder transition.
The impact of thin film confinement on the ordering of lamellae was investigated using symmetric poly(styrene-b-[isoprene-ran-epoxyisoprene]) diblock copolymers bound by nonpreferential wetting interfaces. The order-disorder transition temperature (TODT) and the occurrence of composition fluctuations in the disordered state are not significantly affected by two-dimensional confinement. Directed...
متن کاملMultilayer block copolymer meshes by orthogonal self-assembly
Continued scaling-down of lithographic-pattern feature sizes has brought templated self-assembly of block copolymers (BCPs) into the forefront of nanofabrication research. Technologies now exist that facilitate significant control over otherwise unorganized assembly of BCP microdomains to form both long-range and locally complex monolayer patterns. In contrast, the extension of this control int...
متن کاملAligned sub-10-nm block copolymer patterns templated by post arrays.
Self-assembly of block copolymer films can generate useful periodic nanopatterns, but the self-assembly needs to be templated to impose long-range order and to control pattern registration with other substrate features. We demonstrate here the fabrication of aligned sub-10-nm line width patterns with a controlled orientation by using lithographically formed post arrays as templates for a 16 kg/...
متن کاملA new strategy to fabricate composite thin films with tunable micro- and nanostructures via self-assembly of block copolymers.
A new and facile strategy to fabricate composite thin films with tunable morphologies via self-assembly of block copolymer molecules at the air/liquid interface is first reported. The morphologies (parallel nanowires and foams) of these freestanding thin films can be tuned by varying the molecular structure or other experimental conditions.
متن کامل